The kits supplied mechanical components for wafer-transfer equipment with strict particle and contamination requirements.
The customer’s challenge
Particle shedding and metal-ion release from the parts threatened cleanliness in the customer’s wafer-handling process.
Material and fabrication route
2.0 mm 5052 aluminum; 1.0 mm 304 stainless steel.
Process route: Laser cutting → bending → deburring → chemical cleaning → clean packing → particle inspection.
Manufacturing changes
Dedicated ultrasonic and IPA cleaning, appropriate anodizing and cleanroom packing controlled the supplied condition.
Engineering analysis
Clean supply depended on the final condition after machining, finishing, cleaning and packing, not only on the material grade. The project coordinated these stages around the customer’s wafer-transfer process. Particle count, ion release and packing environment describe different parts of the requirement. Their acceptance methods should be specified for a repeat order so a clean-looking part is not substituted for the required measured condition.
Inspection and project results
Parts met the reported particle and ion-release limits and passed the customer’s clean-supply qualification.
| Project measurement or production detail | Recorded value |
|---|---|
| Particles ≥0.3 μm | ≤10 per part |
| Ion release | ≤1 ppb |
| Packing environment | Class 100 |
These figures describe the project configuration and production scope above. Dimensional, material and production details are identified separately from performance tests. For a new order, the inspection method and acceptance criteria should be agreed against the released drawings.
Planning a similar OEM component
A useful RFQ for this application should make the following interfaces and acceptance requirements clear:
- Part drawings and contact zones.
- Particle and ion-release limits.
- Approved finish and cleaning route.
- Packing environment and verification method.
Include the current drawing revision, mating-component information, quantities and required delivery sequence. Identifying unresolved requirements at quotation stage helps distinguish fabrication work from the equipment-level checks that the project needs.
For related manufacturing support, review our Semiconductor Sheet Metal Parts and sheet metal quality capabilities. Use the existing quotation form below to share the drawing package for review.
